Equipments

‌Group Equipment

Dry Dilution Refrigerator Ⅰ（Bluefors）
·10mk
Wet Dilution Refrigerator Ⅳ（Oxford）
·2T，10mk
Vector Network Analyzer
and related electronic equipments
Laser Doppler Tester
·Temperature range：70K~800K
·Vibration frequency：1Hz ~ 3MHz
Optical Experimental Platform


Self-assembly Flip-chip system


LPCVD
·Si3N4 Film deposition
·Tensile Stress 1.2GPa


RIE（Reactive Ion Etcher）
·Superconductive film Etching,
such as Nb, Ta，NbTiN.
·Dielectric film etching,
such as SiO2, SiNx, α-Si.
VHF（Vapor HF Etcher）
·SiO2 Layer Release
·High selectivity


CPD（Critical Point Dryer）
·MEMS device release
without any stiction


‌Open Platform Equipment

Synergetic Testing Platform
Micro/Nano Fabrication Platform
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